I am currently working on high-performance MEMS/NEMS resonators, with research spanning design theory, microfabrication processes, and nonlinear dynamics. If you are interested in academic collaboration or research discussions, please feel free to contact me at xiaoyuhao@whu.edu.cn.
I graduated from School of Power and Mechanical Engineering, Wuhan University (武汉大学机械与动力学院) with a bachelor’s degree and from the Institute of Technological Sciences, Wuhan University (武汉大学工业科学研究院) with a PH.D. degree, advised by Wu Guoqiang (吴国强).
My research interests include the design and fabrication of MEMS/NEMS resonant devices and their energy dissipation, temperature compensation, and nonlinear behavior.
🎓 Education
- 2022.09 - 2025.06,
Wuhan University, China, Ph.D. in Physical Electronics - 2020.09 - 2022.09, Wuhan University, China, M.Eng. in Microelectronics and Solid-State Electronics (part of a continuous academic project involves postgraduate and doctoral study)
- 2016.09 - 2020.09, Wuhan University, China, B.Eng. in Mechanical Engineering
📝 Publications
Journal
- Yuhao Xiao, Chengliang Sun, Sheng Liu and Guoqiang Wu. Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators. Microsyst. Nanoeng., 2026, 12: 93. (JCR:Q1; IF:9.9)
- Yuhao Xiao, Jinzhao Han, Bowen Li and Guoqiang Wu. Turnover temperature point adjustment in mechanically coupled single-crystal silicon MEMS resonators. J. Microelectromech. Syst., 2025, 34(2): 134-143. (JCR:Q2; IF:3.1)
- Yuhao Xiao, Kewen Zhu, Jinzhao Han, Fang Dong, Chengliang Sun, Sheng Liu and Guoqiang Wu. An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ±100 ppb over industrial temperature range. Sens. Actuators A, Phys., 2024, 380: 116019. (JCR:Q1; IF:4.9)
- Yuhao Xiao, Kewen Zhu, Jinzhao Han, Sheng Liu and Guoqiang Wu. Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals. Chip, 2024, 3(4): 100108. (JCR:Q1; IF:7.1)
- Yuhao Xiao, Jinzhao Han, Kewen Zhu and Guoqiang Wu. A micro-oven controlled dual-mode piezoelectric MEMS resonator with ±190 ppb stability over −40 to 105 °C temperature range. IEEE Electron Device Lett., 2023, 44(8): 1340-1343. (JCR:Q2; IF:4.5)
- Yuhao Xiao, Jinzhao Han, Kewen Zhu and Guoqiang Wu. A piezoelectric mechanically coupled Lamé mode resonator with ultra-high Q. Appl. Phys. Lett., 2023, 122 (11): 114101. (JCR:Q2; IF:3.6)
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Bowen Li#, Yuhao Xiao#, Longlong Li, Zhaomin Hua and Guoqiang Wu. A high-performance mechanically coupled quadruple breathing mode ring resonator. J. Microelectromech. Syst., 2025, 34(4): 365-367. (JCR:Q2; IF:3.1)
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Zhaomin Hua, Yuhao Xiao, Kewen Zhu, Bowen Li, Longlong Li and Guoqiang Wu. High-Dynamic-Range Bulk-Mode Piezoelectric MEMS Resonators via Crystal Orientation Tuning for Duffing Nonlinearity Suppression. J. Microelectromech. Syst., 2026, 35(1): 13-15. (JCR:Q2; IF:3.1)
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Wen Chen, Longlong Li, Zhaomin Hua, Yuhao Xiao and Guoqiang Wu. Machine Learning and Genetic Algorithm-Assisted Design of MEMS Resonator With Multifold Beam Tether for Anchor Loss Reduction. IEEE Trans. Electron Devices, 2026: 1-7. (JCR:Q2; IF:3.2)
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Gongqi Meng, Yuhao Xiao, Sheng Liu and Guoqiang Wu. Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression. J. Microelectromech. Syst., 2026: 1-8. (JCR:Q2; IF:3.1)
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Longlong Li, Yuhao Xiao and Guoqiang Wu. Q Enhancement and TCF Reduction for Piezoelectric MEMS Resonators via Mechanical Coupling. J. Microelectromech. Syst., 2025, 34(6): 777-783. (JCR:Q2; IF:3.1)
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Kewen Zhu, Yuhao Xiao, Wen Chen and Guoqiang Wu. Narrowband ladder-type MEMS filter based on high-Q thin-film piezoelectric-on-silicon MEMS resonators. Microelectronics Journal, 2025, 157: 106588. (JCR:Q3; IF:2.3)
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Wen Chen, Yuhao Xiao, Kewen Zhu, Longlong Li and Guoqiang Wu. Machine-Learning-Assisted Anchor Loss Reduction of MEMS Resonator With One-Dimensional Phononic Crystal Tether. IEEE Trans. Electron Devices, 2025, 72(6): 3127-3132. (JCR:Q2; IF:3.2)
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Can Li, Yuhao Xiao, W. You and Guoqiang Wu. Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators. Microelectronic Engineering, 2024, 293. (JCR:Q2; IF:3.1)
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Zhaoyang Lu, Longlong Li, Wen Chen, Yuhao Xiao, W. You and Guoqiang Wu. A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability. Microelectronic Engineering, 2024, 287. (JCR:Q2; IF:3.1)
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Zekai Wang, Wenjuan Liu, Bohao Hu, Yuhao Xiao, Chaoxiang Yang, Liangyu Lu, Yao Cai, Yan Liu and Chengliang Sun. Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias. J. Microelectromech. Syst., 2024, 33(1): 54-65. (JCR:Q2; IF:3.1)
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Kewen Zhu, Yuhao Xiao, Jinzhao Han and Guoqiang Wu. A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss. J. Microelectromech. Syst., 2024, 33(2): 143-150. (JCR:Q2; IF:3.1)
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Jinzhao Han, Yuhao Xiao, Wen Chen, Kewen Zhu and Guoqiang Wu. Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation. J. Microelectromech. Syst., 2023, 32(3): 271-278. (JCR:Q2; IF:3.1)
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Wen Chen, Wenhan Jia, Yuhao Xiao and Guoqiang Wu. Anchor Loss Reduction for Square-Extensional Mode MEMS Resonator Using Tethers With Auxiliary Structures. IEEE Sensors Journal, 2023, 23(14): 15454-15460. (JCR:Q1; IF:4.5)
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Wenhan Jia, Wen Chen, Yuhao Xiao, Zhongye Wu and Guoqiang Wu. A Micro-Oven-Controlled Dual-Mode Piezoelectric MEMS Resonator With ±400 PPB Stability Over -40 to 80 °C Temperature Range. IEEE Trans. Electron Devices, 2022, 69(5): 2597-2603. (JCR:Q2; IF:3.2)
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Wen Chen, Wenhan Jia, Yuhao Xiao and Guoqiang Wu. Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators. J. Microelectromech. Syst., 2022, 31(3): 318-327. (JCR:Q2; IF:3.1)
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Wen Chen, Wenhan Jia, Yuhao Xiao, Zhihong Feng and Guoqiang Wu. A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals. IEEE Electron Device Lett., 2021, 42(9): 1307-1310. (JCR:Q2; IF:4.5)
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Jinzhao Han, Yuhao Xiao, Wen Chen, Wenhan Jia, Kewen Zhu and Guoqiang Wu. Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges. J. Microelectromech. Syst., 2022, 31(5): 715-722. (JCR:Q2; IF:3.1)
Conference
- Yuhao Xiao, Wen Chen, Jinzhao Han, Kewen Zhu, and Guoqiang Wu. A piezoelectric width-flexural mode MEMS resonator with high quality factor and low motional resistance. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), IEEE, 2023: 1825-1828.
- Linhai Huang, Zhihong Feng, Yuhao Xiao, Fengpei Sun and Jinghui Xu. High-Q and low-motional impedance piezoelectric MEMS resonator through mechanical mode coupling. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, 2023: 1159-1162.
Patents
- 吴国强, 肖宇豪, 陈文, 韩金钊. 一种微机械谐振器及其制备方法，Patent No.：ZL202111298256.1.
- 吴国强, 肖宇豪, 陈文, 贾文涵, 韩金钊. 一种恒温控制微机械谐振器，Patent No.：ZL202210484630.5.
- 吴国强, 肖宇豪, 韩金钊, 朱科文, 华兆敏, 李灿. 一种恒温控制微机械谐振器及其恒温控制方法、制备方法，Patent No.：202211292419.X.
- 吴国强, 肖宇豪, 韩金钊, 朱科文, 华兆敏, 李灿. 一种微机械谐振器及其制备方法，Patent No.：202211367814.X.
- 吴国强, 肖宇豪, 韩金钊, 朱科文, 华兆敏, 李灿. 一种微机械谐振器及其制备方法、微机械振荡器，Patent No.：202310335087.7.
🏅 Honors and Awards
- 中国大学生机械工程创新创意大赛“明石杯”微纳传感技术与智能应用赛国家二等奖, 2024
- Academic Innovation Scholarship of Wuhan University, 2023, 2025
- Academic Scholarship of Wuhan University, 2021, 2023
- Excellent Postgraduate of Wuhan University, 2023
- Excellent Undergraduate of Wuhan University, 2017-2019
🏛️ Invited Talks
- MINE Ph.D. Academic Salon, 2025 (Outstanding Speaker)
💻 Work Experience
- 2025.12 - now, Wuhan University, Post-doctoral fellow
- 2025.7 - 2025.11, Yangtze Memory Technologies Co., Ltd., TD PIE